SI1 Silicon Interdigitated Electrode Array for MEMS Gas Optical and Biosensors

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SI1 Silicon Interdigitated Electrode Array for MEMS Gas Optical and Biosensors

Name: SI1 Silicon Interdigitated Electrode Array for MEMS Gas Optical and Biosensors
SKU: SI1
Availability: InStock

Price range: $40.00 through $4,998.00

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SKU: SI1 Category: Interdigitated Electrode (IDE)

Silicon Interdigitated Electrode Array

This interdigitated electrode array is manufactured on a
single-crystal silicon substrate with a thermally grown silicon
dioxide insulating layer. The electrode structure consists of
a 50 nm titanium adhesion layer and a 100 nm gold
conductive layer. Multiple finger-width, finger-gap and
finger-pair configurations are available for MEMS, gas-sensing,
optical-sensing and biosensor research.

Product Specifications

Product Type	Silicon interdigitated electrode array
Substrate Material	Single-crystal silicon
Overall Dimensions	4 × 6 × 0.5 mm
Insulating Layer	Thermally grown silicon dioxide (SiO₂)
SiO₂ Layer Thickness	285 nm
Metal Structure	Titanium / Gold (Ti/Au)
Titanium Layer Thickness	50 nm
Gold Layer Thickness	100 nm
Operating Temperature	−150°C to 500°C
Electrode Pattern	Interdigitated electrode array

Available Models

Select the required finger width, finger gap and number of
interdigitated finger pairs from the configurations below.

Model	Overall Size	Finger Width	Finger Gap	Finger Pairs	Metal Structure
SI-IDE-4X6-3W-3G-195P	4 × 6 × 0.5 mm	3 μm	3 μm	195 pairs	50 nm Ti / 100 nm Au
SI-IDE-4X6-5W-3G-138P	4 × 6 × 0.5 mm	5 μm	3 μm	138 pairs	50 nm Ti / 100 nm Au
SI-IDE-4X6-5W-5G-119P	4 × 6 × 0.5 mm	5 μm	5 μm	119 pairs	50 nm Ti / 100 nm Au
SI-IDE-4X6-10W-10G-25P	4 × 6 × 0.5 mm	10 μm	10 μm	25 pairs	50 nm Ti / 100 nm Au
SI-IDE-4X6-20W-20G-25P	4 × 6 × 0.5 mm	20 μm	20 μm	25 pairs	50 nm Ti / 100 nm Au
SI-IDE-4X6-30W-30G-25P	4 × 6 × 0.5 mm	30 μm	30 μm	25 pairs	50 nm Ti / 100 nm Au

Typical Applications

MEMS sensor development
Gas-sensing research
Optical and photoelectric sensing
Biosensor development
Impedance and capacitive measurements
Functional-material coating studies

Customization Available

Custom silicon interdigitated electrode configurations are
available. Please contact our customer service team for detailed
information.

When requesting customization, please provide the required chip
dimensions, finger width, finger gap, finger-pair count, metal
structure and technical drawing, if available.

Contact Customer Service

Size	MINIMUM-ORDER-3PCS, SI-IDE-4IN-CUSTOM, SI-IDE-5X7-100UM-75P, SI-IDE-5X7-10UM-75P, SI-IDE-5X7-20UM-35P, SI-IDE-5X7-25UM-35P, SI-IDE-5X7-30UM-20P, SI-IDE-5X7-3UM-200P-CUSTOM, SI-IDE-5X7-50UM-15P, SI-IDE-5X7-5UM-120P, SI-IDE-6IN-CUSTOM